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VLSI ImplementationCircuit PerformanceGate OxideFLASH MemorySubstrate Hot Electron InjectionCircuit TechniquesHardware ComplexityEmbedded DRAMSOI TechnologyStress-Induced Leakage CurrentGate DielectricsESD Protection DevicesGate Oxide IntegrityCMOS TechnologyDRAM TechnologyArray ArchitectureCMOS TransistorProcess IntegrationChannel EffectTrench Capacitor