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Process TechnologyModeling and SimulationIntegrated CircuitsSolid State DevicesGate DielectricsNanoelectronic DevicesMemory TechnologySemiconductor DevicesCompound SemiconductorCMOS TechnologiesQuantum ElectronicsGate DielectricCMOS TechnologyGate Oxide ThicknessGate OxideHot CarrierStress-Induced Leakage CurrentDrive CurrentFilm TransistorsNon-Volatile Memory