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Thin FilmsReactive Ion EtchingPlasma EtchingIon PlatingThin FilmAuger Electron SpectroscopyOptical CoatingsDry EtchingSuperconducting Thin FilmsChemical Vapor DepositionMolecular Beam EpitaxyInP SubstrateSubstrate TemperatureX-Ray Photoelectron SpectroscopyElectrical PropertiesRutherford BackscatteringEtchingRoom TemperatureReactive SputteringIndustrial Applications
vol.44 (1989)
vol.43 (1988)
vol.42 (1987)
vol.41 (1985)