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Thin FilmsReactive Ion EtchingPlasma EtchingIon PlatingThin FilmAuger Electron SpectroscopyOptical CoatingsDry EtchingSuperconducting Thin FilmsChemical Vapor DepositionMolecular Beam EpitaxyInP SubstrateSubstrate TemperatureX-Ray Photoelectron SpectroscopyElectrical PropertiesRutherford BackscatteringEtchingRoom TemperatureReactive SputteringIndustrial Applications