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Auger Electron SpectroscopyRutherford BackscatteringExperimental DataIon ImplantationSurface LayerComputer SimulationElectrophysical PropertiesCrystal SurfaceSilicon SurfacePhase CompositionThin FilmsSolid SurfaceTemperature DependenceWork FunctionSurface CompositionPrimary ElectronPulsed Laser IrradiationSecondary Electron EmissionLaser RadiationDepth Profiling
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